機床調整,對中 Adjustment and alignment of machines and devices
機床維護 Maintenance of machines
高精度機床內部Internal measurement system for high-accuracy machines
螺桿質量測試 Lead screw verification
動態測量 Dynamic measurement
航空和汽車工業 Aircraft and automobile industry
大尺寸工件高精度測量 Measurement and checking of large dimensions
計量校正 Metrology and calibration institutes
作為長度標準,具有不同的應用 The system is used in various applications as a length standard
微電子行業 Microelectronic industry
The internal multiaxis system for high precision positioning mechanisms with both open and closed control loop, e.g.
- step and repeat cameras
- testing of semiconductor wafers
- laser writing machines
Other applications
任何需要對位置和幾何參數精密測量的行業和應用,以及研發、科學研究等領域
動態測試功能:
LOS 雙頻激光干涉儀可以進行動態測試,采樣頻率可達500Hz, 完成測量后,即可進行數據處理,可以按照需要的格式進行顯示和打印。 WinScope軟件除了可以提供測試的數值外,還有許多便利的功能,如,觸發模式設置,計算和統計功能, FFT快速傅里葉變換算法,光譜分析, 強大的圖形顯示等.
位移,速度、加速度測試
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Standard LOS System configuration is designed to measure position, velocity and acceleration. A typical application is the calibration of positional accuracy of CNC machine tools. In this measurement the difference between the desired and actual position of the machine's moving part is evaluated. The method of measurement and evaluation corresponds to international standards (ISO 230-2, VDI/DGQ 2617,3441, NMTBA). The whole measurement process and printing of protocol is controlled by the computer programme and is fully automatic.
Software Compensation of Machine Tool Positional Errors
The measured positional errors can be transferred as correction data on line into the machine tool control system immediately after measurement. Considerable improvement of positional accuracy can thus be achieved in a minimum time. The producer delivers software modules which compensate for various control systems (SIEMENS, HEIDENHEIN, DYNAPATH, SELCA, YASNAC, FANUC, ACRAMATIC).
Further Applications
Positional accuracy of a co-ordinate measurement machine can be calibrated in a similar way (VDI 2617 standard). The LOS system is used also for the calibration of dimensional gauges. Laser systems cannot be replaced when precision measurement of long distances (up to 40 meters) is required.
Errors in straightness of movement and in parallelity of axes can be measured by the LS 127ST set. The laser beam is split in the LS 127.1 differential beamsplitter into two parallel beams. After going through the optical wedge LS 127.2 the beams diverge at a small angle. The optical wedge functions as the straightness sensor. Reflector LS 127.3, formed by two inclined extremely precise plane mirrors, returns the beams back into the differential beamsplitter. The axis of the mirror reflector defines the straight line reference. This straightness measurement method is less sensitive to air turbulence disturbances than other methods. This straightness set also shows low sensitivity to possible inclinations of the straightness sensor during its movement at measurement.
The standard configuration for position measurement except the LS 20.1, LS 21.1, LS 70, LS 90.1, LS 90.3 is used for straightness measurement. The optical parts are fixed by the set of holders LS 51.