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The X-Prep® fixture adapter is also secured to the motorized stage on the X-Prep® Vision™， ensuring the measurement/tool control coordinates remain aligned when transferred between systems.

A library with over 130 materials (i.e.， GaAs， InGaAs， SiC， Sapphire/Al2O3， InP， SiGe， GaN， photo-resist) is included with every system.

Meaurement & Observation - How it Works

IR light is focused onto a sample， and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.

Meauring Below 10 μm Thickness

For applications requiring thinning to less than 10 μm， precise measurement is possible only by adding the visible light spectrometer accessory.

FEATURES