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PVD Products’ provides a wide variety of custom physical vapor deposition systems.

Shown here is a dual chamber system including PLD and Magnetron sputtering connected via a dual wafer loadlock. PVD can provide combination systems like this or completely integrated custom systems specific to the customer requirements.

三腔室設計： PLD腔體+Sputter磁控濺射腔體+Load-lock樣品傳輸腔體

3 UHV Mags

3 x 15 cc ebeam

RHEED

Ellipsometer

100-mm wafers

850°C

RF Bias

<5 x 10-9Torr