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石墨烯生長設備(TCVD) - 配備熱壁石英管和LabVIEW自動控制軟件。

技術規格如下：

1. 石英管及工藝爐 QUARTZ TUBE & FURNACE

- Tube Dimensions: ф100*1200mm

- Furnace Body (WxHxD): 500x500x350

- Heater: Kanthal Wire w/ Glass Wool Molding

- Maximum Temperature: 1，100°C

- Thermocouple: K type， ID 6.5 mm

- Heating Zone: 1-zone， ф100*350mm

- Linear Motion Control Unit

- Manual Furnace Door

2. 氣路 GAS SUPPLY UNIT

- Three (3) Mass Flow Controllers w/ 1% FS Accuracy

a) Hydrogen (H2)， 100sccm

b) Methane (CH4)， 200sccm

c) Argon (Ar): 1，000sccm

- Open Mounting Bay for Fourth (4th) MFC

- 0.25” Stainless Steel Tubing

- Five (5) 0.25” Pneumatic-Type Diaphragm Valves

3. 真空及壓力控制 VACUUM & PRESSURE CONTROL UNIT

- Convection Gauge

- Convection Gauge Controller

- 10 Torr Capacitance Manometer

- Motor-Geared Throttle Valve

- Pressure & Flow Controller

- Oil Rotary Pump (340L/M)

4. 系統控制單元 SYSTEM CONTROL UNIT

- MS Windows 7 Embedded PC

- PLC Module with National Inst. LabVIEW Interface

- 19” LCD Monitor

5. 安全及冷卻 SAFETY & COOLING

- Water Cooled End Flanges

- Buzzer Alarm & System Error Display

- Interlock System

6. 設備尺寸及實驗室要求 DIMENSIONS & UTILITY REQUIREMENTS

- Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)

- Weight: ~200kg

- Power: 220V， 50/60Hz， 3Φ， 4-wire， 30A

- Air: 4-5kgf/cm2， 0.25” tube

- Water: 2-3kgf/cm2， 0.25” tube

參考用戶：

劍橋大學，牛津大學，曼徹斯特大學，萊斯大學，斯坦福大學，新加坡國立大學，東京技術研究所，東京大學，韓國東國大學等...